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Application spotlight: 15-inch 3D printed gas distribution ring for semiconductor applications

Application spotlight: 15-inch 3D printed gas distribution ring for semiconductor applications

Ceramics are often only considered when polymers and metals don't make the grade.

Similarly, it is often only when a conventional manufacturing method fails to enable the required geometry that 3D printing is called upon.

And so it was the case when Plasway was manufacturing an Atomic Layer Deposition gas distribution ring. Metal materials wouldn't provide the chemical resistance required, and subtractive techniques struggled with the shape of the rings and the resolution of the nozzles.

Enter Alumina Systems with its Lithoz S320 Lithography-based Ceramic Manufacturing (LCM) system.

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